IVB-7 the sidewall resistor—A novel test structure to reliably extract specific contact resistivity

✍ Scribed by Loh, W.M.; Wright, P.J.; Schreyer, T.A.; Swirhun, S.E.; Saraswat, K.C.; Meindl, J.D.

• Book ID: 114595791
• Publisher: IEEE
• Year: 1986
• Tongue: English
• Weight: 298 KB
• Volume: 33
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1986.22803