IVA-5 through-AIN implantation for a high transconductance self-aligned GaAs MESFET

✍ Scribed by Nishi, H.; Onodera, H.; Kawata, H.; Yokoyama, N.; Shibatomi, A.

• Book ID: 114594584
• Publisher: IEEE
• Year: 1983
• Tongue: English
• Weight: 105 KB
• Volume: 30
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1983.21377