Issues in metal/semiconductor contact design and implementation

✍ Scribed by M.-A. Nicolet; E. Kolawa; J. Molarius

• Book ID: 103902093
• Publisher: Elsevier Science
• Year: 1989
• Weight: 676 KB
• Volume: 27
• Category: Article
• ISSN: 0379-6787
• DOI: 10.1016/0379-6787(89)90027-6

✦ Synopsis

The design of a metal/semiconductor contact must meet requirements of an electronic nature (I(V) characteristic) and of an atomic nature (metallurgical stability). A conceptual scheme is described that embodies these two requirements in two distinct elements of the contact. Empirically developed contact schemes now used in silicon-based devices conform to this design concept and give it credence. Its implementation in non-silicon semiconductors is discussed. New ways of achieving stability by selecting a particular combination of materials show promise and are demonstrated for the example of aluminum contacts to silicon.