Issues for multilevel metallization in high density circuits: Invited lecture

✍ Scribed by H. Joswig; H.J. Barth; N. Elbel; S. Penka

• Book ID: 114155651
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 741 KB
• Volume: 37-38
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(97)00090-7