✦ LIBER ✦
Isotropic etch for SiO2 microcantilever release with ICP system
✍ Scribed by Qi Chen; Ji Fang; Hai-Feng Ji; Kody Varahramyan
- Book ID
- 104051829
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 396 KB
- Volume
- 85
- Category
- Article
- ISSN
- 0167-9317
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