Isolation techniques for very large scale integration : D. Beernaert, G. Schols and P. Van Iseghem. Electl Commun.57 (2), 161 (1982)

• Book ID: 107829592
• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 130 KB
• Volume: 23
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(83)91110-1