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Irradiation stability of silicon photodiodes for extreme-ultraviolet radiation

✍ Scribed by Scholze, Frank ;Klein, Roman ;Bock, Thomas


Book ID
115350982
Publisher
The Optical Society
Year
2003
Tongue
English
Weight
347 KB
Volume
42
Category
Article
ISSN
1559-128X

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In this work, we present a new amorphous silicon balanced photodiode, which takes advantage of the differential measurement to reveal very small variations of photocurrent in a large background current signal. The device has been fabricated with a four-mask process and characterized in dark and und