AFM and AES studies on the electron-beam
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Jiang, Z. X.; Li, C. Y.; Wang, J. L. F.
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Article
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2000
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John Wiley and Sons
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English
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The interactions between electrons and SiO 2 are of interest to modern materials characterization and processing technologies. In this work, electron-beam-irradiation-induced modification has been investigated in a superficial oxide (SiO 2 /Si) and a buried oxide in Cu/TaN/SiO 2 /Si using atomic for