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[IRE 1987 International Electron Devices Meeting - ()] 1987 International Electron Devices Meeting - A 4.2µm2Half-VCCsheath-plate-capacitor DRAM cell with self-aligned buried plate-wiring

✍ Scribed by Kaga, T.; Kawamoto, Y.; Kure, T.; Nakagome, Y.; Aoki, M.; Sunami, H.; Itoh, K.


Book ID
126745799
Publisher
IRE
Year
1987
Weight
356 KB
Category
Article

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