✦ LIBER ✦
[IRE 1983 International Electron Devices Meeting - ()] 1983 International Electron Devices Meeting - Electron-beam fabrication of quarter-micron T-shaped-gate FETs using a new tri-layer resist system
✍ Scribed by Chao, P.C.; Smith, P.M.; Wanuga, S.; Hwang, J.C.M.; Perkins, W.H.; Tiberio, R.; Wolf, E.D.
- Book ID
- 121298926
- Publisher
- IRE
- Year
- 1983
- Weight
- 564 KB
- Category
- Article
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