✦ LIBER ✦
[IRE 1982 International Electron Devices Meeting - ()] 1982 International Electron Devices Meeting - The SWAMI - A defect free and near-zero bird's-beak local oxidation process and its application in VLSI technology
✍ Scribed by Chiu, K.Y.; Fang, R.; Lin, J.; Moll, J.L.; Lage, C.; Angelos, S.; Tillman, R.
- Book ID
- 124163007
- Publisher
- IRE
- Year
- 1982
- Weight
- 419 KB
- Category
- Article
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