[IRE 1978 International Electron Devices Meeting - ()] 1978 International Electron Devices Meeting - Diaphragm formation and pressure sensitivity in batch-fabricated silicon pressure sensors

✍ Scribed by Wise, K.D.; Clark, S.K.

• Book ID: 118116385
• Publisher: IRE
• Year: 1978
• Weight: 488 KB
• Volume: 0
• Category: Article
• DOI: 10.1109/iedm.1978.189361