✦ LIBER ✦
IR study of fundamental chemical reactions in atomic layer deposition of HfO2 with tetrakis(ethylmethylamino)hafnium (TEMAH), ozone, and water vapor
✍ Scribed by F. Hirose; Y. Kinoshita; K. Kanomata; K. Momiyama; S. Kubota; K. Hirahara; Y. Kimura; M. Niwano
- Book ID
- 116245290
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 716 KB
- Volume
- 258
- Category
- Article
- ISSN
- 0169-4332
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