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IR studies of reactive DC magnetron sputtered SiC films on silicon using effective medium theory

✍ Scribed by Y.M Lei; Y.H Yu; L.L Cheng; C.X Ren; S.C Zou; S.P Wong; D.H Chen; I.H Wilson


Book ID
117358923
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
147 KB
Volume
43
Category
Article
ISSN
0167-577X

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