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Ionized-cluster beam deposition and epitaxy

✍ Scribed by Toshinori Takagi; Isao Yamada; Kakuei Matsubara

Publisher: Elsevier Science
Year: 1979
Tongue: English
Weight: 696 KB
Volume: 58
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(79)90199-8

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