Ionic outgassing from photoacid generators upon irradiation at 13.5 nm

✍ Scribed by Grace H. Ho; Chih-Jen Liu; Chih-Han Yen; Ming-Hsuan Ho; Sih-Yu Wu

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 346 KB
• Volume: 85
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2008.06.024