✦ LIBER ✦
Ion-surface interactions in the study of dry etching: A McKinley and WG Graham, Department of Physics, University of Ulster, Coleraine, BT52 1 SA, UK
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 39 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0042-207X
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