Ion sputtering rates of W-, Ti- and Cr-carbides studied at different Ar+ ion incidence angles

✍ Scribed by A. Zalar; J. Kovač; B. Praček; P. Panjan; M. Čeh

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 801 KB
• Volume: 254
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2008.04.049