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Ion multiple scattering: A tool for studying the thickness topography of self-supporting targets

โœ Scribed by D. Schmaus; A. L'Hoir; C. Cohen


Publisher
Elsevier Science
Year
1982
Weight
389 KB
Volume
194
Category
Article
ISSN
0167-5087

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โœ H.H. Brongersma; P.M. Mul ๐Ÿ“‚ Article ๐Ÿ“… 1972 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 587 KB

Noble m.s ions which are back-scattered from s crystal surface lose 3. specific amount of energy for surface atoms of 3 specific miss. The chemical reaction of B silicon (111) crystal surface with bromine has been followed using He+ and Ne+ ion scatter&. It is shown that this rechnique an bc used t