Ion-molecule reactions in mixtures of trimethylaluminum and methylamines

✍ Scribed by Stephan B.H. Bach; Denise C. Parent

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 652 KB
• Volume: 4
• Category: Article
• ISSN: 1044-0305
• DOI: 10.1016/1044-0305(93)85066-7

✦ Synopsis

The ion-molecule reactions of mixtures of trimethylaluminum and methylamines, to serve as a model system for group 13-15 semiconductor fabrication, were examined by using Fourier transform ion cyclotron resonance mass spectrometry. Sequential ion-molecule reactions leading to formation of multiple adduets were observed for each of the reactant mixtures investigated. Collision-induced dissociation was used to probe the adduct structures. There is evidence for hydrogen bonding between the amines and aluminum in most of the adducts studied. Rearrangement of the aluminum/nitrogen skeletons was not observed, although the aluminum/nitrogen bonds appear to be relatively strong, so that stable adducts can be formed. The monomethylamine and dimethylamine readily produce gas-phase neutral adducts with trimethylaluminum, which can be related to the basicities of the methylamines.