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Ion modification of the properties of metal films evaporated on Si and SiO2

โœ Scribed by A.F. Vyatkin; V.N. Mordkovich; G.A. Zhukova

Book ID
114168184
Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
260 KB
Volume
19-20
Category
Article
ISSN
0168-583X

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