Ion microprobe for studying cluster ion decay reactions

✍ Scribed by A. D. Bekkerman; N. Kh. Dzhemilev; V. M. Rotstein

• Publisher: John Wiley and Sons
• Year: 1990
• Tongue: English
• Weight: 360 KB
• Volume: 15
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/sia.740151003

✦ Synopsis

Abstract

In the present paper, an ion microprobe is used to study the fragmentation regularities of Al~n~^+^ and Si~n~^+^ cluster ions sputtered under ion bombardment. The results have shown that the ions formed during cluster fragmentation, along the path from the target to the detector, transform the mass spectra of both charged and neutral components and the energy distribution of the parent cluster and monomer ions.