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Ion irradiation induced Al–Ti interaction in nano-scaled Al/Ti multilayers

✍ Scribed by M. Milosavljević; N. Stojanović; D. Peruško; B. Timotijević; D. Toprek; J. Kovač; G. Dražič; C. Jeynes

Book ID
116244404
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
499 KB
Volume
258
Category
Article
ISSN
0169-4332

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On the ion irradiation stability of Al/T
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✍ D. Peruško; M.J. Webb; V. Milinović; B. Timotijević; M. Milosavljević; C. Jeynes 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 283 KB

A comparative study of the structural changes induced in Al/Ti and AlN/TiN multilayers by argon ion irradiation is presented. The layers were deposited on Si substrates, by ion sputtering in case of pure metals, and reactive ion sputtering in case of metal-nitrides, to a total thickness of $270 nm.