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Ion induced structures and electrical conduction in implanted polymer films

โœ Scribed by Y.Q. Wang; R.E. Giedd; L.B. Bridwell

Book ID
113284066
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
626 KB
Volume
79
Category
Article
ISSN
0168-583X

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Pristine CsO films, which were sublimed onto Si( loo), were implanted with 20 keV K+ ions at a dose of 2.7x 1016/cm2. The distribution of K+ and contamination of oxygen were studied using Rutherford backscattering. The four-probe technique was used to measure the sheet resistance of the films, and t