✦ LIBER ✦
Ion-induced Auger electron spectroscopy—A new detection method for compositional homogeneities of alloyed atoms in silicon
✍ Scribed by Akio Hiraki; Takeshi Imura; Motohiro Iwami; Su-Chol Kim; Katsumi Ushita; Hiroaki Okamoto; Yoshihiro Kamakawa
- Book ID
- 107905583
- Publisher
- Elsevier Science
- Year
- 1979
- Weight
- 255 KB
- Volume
- 2
- Category
- Article
- ISSN
- 0165-1633
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