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Ion implantation post-processing of amorphous carbon films

โœ Scribed by Ager, J.W; Anders, S; Anders, A; Wei, B; Yao, X.Y; Brown, I.G; Bhatia, C.S; Komvopoulos, K


Book ID
121897613
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
149 KB
Volume
8
Category
Article
ISSN
0925-9635

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