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Ion-implantation induced anomalous surface amorphization in silicon

✍ Scribed by T. Lohner; E. Kótai; N.Q. Khánh; Z. Tóth; M. Fried; K. Vedam; N.V. Nguyen; L.J. Hanekamp; A. van Silfhout

No coin nor oath required. For personal study only.

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