✦ LIBER ✦
Ion implantation in semiconductors—Part II: damage production and annealing : J. F. Gibbons. Proc. IEEE 60, No. 9, September (1972), p. 1062
- Publisher
- Elsevier Science
- Year
- 1973
- Tongue
- English
- Weight
- 115 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0026-2714
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