✦ LIBER ✦
Ion implantation in semiconductors—I. Range distribution theory and experiments : J.F. GibbonsProc. IEEE 56, No. 3, March (1968), p. 295
- Publisher
- Elsevier Science
- Year
- 1968
- Tongue
- English
- Weight
- 72 KB
- Volume
- 7
- Category
- Article
- ISSN
- 0026-2714
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