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Ion implantation in CVD diamond and plasma treatment effect

✍ Scribed by Yagyu, Hiroyuki; Deguchi, Masahiro; Won, Jai Hyung; Mori, Yusuke; Hatta, Akimitsu; Kitabatake, Makoto; Ito, Toshimichi; Hirao, Takashi; Hiraki, Akio


Book ID
123227544
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
526 KB
Volume
4
Category
Article
ISSN
0925-9635

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## Abstract Micro and nanocrystalline diamond layers have been deposited on molybdenum substrates by hot‐filament CVD, and tested in the Mega Amp Spherical Tokamak as a protective coating of fusion plasma‐facing materials. The modification of surface properties induced by high density plasma was in