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Ion Implantation Condition for 2 μm Period Ion-Implanted Propagation Tracks

✍ Scribed by Miyashita, T.; Betsui, K.; Tochiki, Y.; Komenou, K.


Book ID
119817799
Publisher
Institute of Electrical and Electronics Engineers
Year
1985
Weight
218 KB
Volume
1
Category
Article
ISSN
0882-4959

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