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Ion-implantation associated defect production in silicon : J. R. Troxell. Solid-St. Electron.26 (6), 539 (1983)

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 127 KB
Volume: 24
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(84)90832-1

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