✦ LIBER ✦
Ion-implant compensation of tensile stress in Tungsten absorber for low distortion X-ray masks
✍ Scribed by I. Plotnik; M.E. Porter; M. Toth; S. Akhtar; Henry I. Smith
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 323 KB
- Volume
- 5
- Category
- Article
- ISSN
- 0167-9317
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