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Ion evaporation techniques based on the electron beam evaporation source only

✍ Scribed by P. Glaser; Á.R. Herman; G. Vágó


Publisher
Elsevier Science
Year
1979
Tongue
English
Weight
56 KB
Volume
63
Category
Article
ISSN
0040-6090

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## Abstract ZnSe films were deposited on glass substrates keeping the substrate temperatures, at room temperature (RT), 75, 150 and 250 °C. The films have exhibited cubic structure oriented along the (111) direction. Both the crystallinity and the grain size increased with increasing deposition tem