✦ LIBER ✦
Ion-Enhanced Etching of Si(100) with Molecular Chlorine: Neutral and Ionic Product Yields as a Function of Ion Kinetic Energy and Molecular Chlorine Flux †
✍ Scribed by Materer, N.; Goodman, Rory S.; Leone, Stephen R.
- Book ID
- 126177357
- Publisher
- American Chemical Society
- Year
- 2000
- Tongue
- English
- Weight
- 169 KB
- Volume
- 104
- Category
- Article
- ISSN
- 0022-3654
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