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Ion energy distributions for the identification of active species and processes in low pressure hollow cathode discharges

✍ Scribed by Tanarro, I; Herrero, V J

Book ID: 123613718
Publisher: Institute of Physics
Year: 2009
Tongue: English
Weight: 442 KB
Volume: 18
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/18/3/034007

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