Ion energy distribution in triode ion plating : P. Saulnier, A. Debhi and J. Machet. Vacuum34 (8/9), 765 (1984)

• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 249 KB
• Volume: 25
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(85)90349-x