Ion energy determination for r.f. plasma and ion beam using a multigrid retarding field analyser

✍ Scribed by Y. Yuan; J. Bansky; J. Engemann; A. Brockhaus

• Book ID: 107930544
• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 360 KB
• Volume: 74-75
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(95)08320-0