✦ LIBER ✦
Ion beams promise practical systems for submicrometer wafer lithography : Robert L. Seliger and Paul A. Sullivan. Electronics. 142 (27 March 1980)
- Book ID
- 103275437
- Publisher
- Elsevier Science
- Year
- 1980
- Tongue
- English
- Weight
- 99 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0026-2714
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