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Ion beam sputter deposition of thin film sensors for applications in highly loaded contacts

✍ Scribed by E. Kagerer; M.E. Königer

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 621 KB
Volume: 182
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(89)90269-1

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