Ion beam shadowing effect in submicrometer large-angle-tilt implanted drain (LATID) MOSFETs

✍ Scribed by Hung-Sheng Chen; Chih-Sieh Teng; Larry Moberly; Rajeeva Lahri

• Book ID: 103394940
• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 254 KB
• Volume: 38
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(94)00256-f