Titanium oxy-nitride films deposited on
Titanium oxy-nitride films deposited on stainless steel by an ion beam assisted deposition technique
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K. Yokota; K. Nakamura; T. Kasuya; S. Tamura; T. Sugimoto; K. Akamatsu; K. Nakao
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Article
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2003
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Springer
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English
β 859 KB