Ion beam mixing modification of sputter-deposited molybdenum films on Si3N4 ceramics

✍ Scribed by Mingwu Bai; Xushou Zhang

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 315 KB
• Volume: 249
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(94)90758-7