Effect of crystallinity on the memory ef
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Y. Batra; D. Kabiraj; D. Kanjilal
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Article
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2008
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Elsevier Science
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English
โ 241 KB
The effect of crystallinity of Ge nanocrystals on the charge storage properties of the metal oxide semiconductor (MOS) structure has been investigated. MOS structure with Ge nanocrystals embedded in the oxide has been fabricated by using atom beam sputtering technique. After annealing at 600 ยฐC in A