✦ LIBER ✦
Ion beam exposure characteristics of resists: Experimental results: T M Hall et al,J Appl Phys, 53 (6), 1982, 3977–4010
- Book ID
- 103464430
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 185 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0042-207X
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