✦ LIBER ✦
Ion beam etching of high resolution structures in Ta2O5 for grating-assisted directional coupler applications
✍ Scribed by Andreas Perentos; Arnan Mitchell; Anthony Holland
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 380 KB
- Volume
- 252
- Category
- Article
- ISSN
- 0169-4332
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