✦ LIBER ✦
Ion beam etching GaAs for integrated optical applications : A. P. Webb and C. D. W. WilkinsonVacuum34 (1–2), 159 (1984)
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 133 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0026-2714
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