Ion beam effects in SiOx (x<2) subjected to low energy Ar+, He+ and N2+ bombardment

✍ Scribed by J.P. Holgado; A. Barranco; F. Yubero; J.P. Espinos; A.R. González-Elipe

• Book ID: 114165425
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 168 KB
• Volume: 187
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(01)01153-3