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Ion-beam direct-structuring of high-temperature superconductors

✍ Scribed by W. Lang; M. Dineva; M. Marksteiner; T. Enzenhofer; K. Siraj; M. Peruzzi; J.D. Pedarnig; D. Bäuerle; R. Korntner; E. Cekan; E. Platzgummer; H. Loeschner

Book ID
108207586
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
748 KB
Volume
83
Category
Article
ISSN
0167-9317

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✍ E. Platzgummer; A. Biedermann; H. Langfischer; S. Eder-Kapl; M. Kuemmel; S. Cern 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 564 KB

A software tool (''Ionshaper TM '') has been developed which allows calibrated high precision simulation of ion beam processing. The continuum model is based on a discrete surface element approach that includes first and second-order sputtering and re-deposition in 2D. Atomistic effects are implicit