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Ion beam deposition of β-SiC layers onto α-SiC substrates : S. P. Withrow, K. L. More, R. A. Zuhr and T. E. Haynes. Vacuum39(11/12), 1065 (1989)


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
110 KB
Volume
30
Category
Article
ISSN
0026-2714

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